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Large substrate compatible device - List of Manufacturers, Suppliers, Companies and Products

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Large substrate compatible equipment (film formation, etching, annealing)

Expansion to advanced packages: Processing is possible on a 510×515mm substrate.

We will provide a comprehensive proposal for the entire process from the previous stage to the next stage. (Film formation, etching/ashing, annealing) Since it is custom-made, we will propose cost-effective equipment that incorporates only the necessary functions.

  • Sputtering Equipment
  • Etching Equipment
  • Annealing furnace

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